Resin Material Dependence of Pit Shape in Thermal Direct Mastering
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概要
- 論文の詳細を見る
We report the resin material dependence of the shape of pits obtained by thermal direct mastering (TDM), which is a heat-mode mastering method utilizing the thermal decomposition of resins. By applying suitable resins, both circular and crescent pits can be obtained by TDM. This difference in shape was considered to originate from the temperature difference between the glass transition temperature and the thermal decomposition temperature of the resins. The resin with a relatively small temperature difference was suitable for the fabrication of the circular pits and random patterns, and the resin with a large temperature difference was suitable for the fabrication of the crescent pits and monotone patterns with high linear density. By using a deep ultraviolet (DUV) laser mastering system with a wavelength of 257 nm and a numerical aperture of 0.90, a monotone pattern of 40-nm-length pits was fabricated by applying a novolak-type resin with a relatively large temperature difference.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-06-30
著者
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Murakami Yoshiteru
Avanced Technology Research Laboratories, SHARP Corporation, Tenri, Nara 632-8567, Japan
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Sakai Toshihiko
Avanced Technology Research Laboratories, SHARP Corporation, Tenri, Nara 632-8567, Japan
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Shimo Masanori
Avanced Technology Research Laboratories, SHARP Corporation, Tenri, Nara 632-8567, Japan
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Takamori Nobuyuki
Avanced Technology Research Laboratories, SHARP Corporation, Tenri, Nara 632-8567, Japan
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Takahashi Akira
Avanced Technology Research Laboratories, SHARP Corporation, Tenri, Nara 632-8567, Japan