Integrated Optical Beam Splitters Employing Symmetric Mode Mixing in SiO2/SiON/SiO2 Multimode Interference Waveguides

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概要

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• A collection of SiON films with different chemical compositions (various O/N ratios) were deposited on silicon substrates using plasma-enhanced chemical vapor deposition (PECVD). These films were then optically characterized to delineate the impacts of relevant film growth parameters to the corresponding refractive indices and infrared absorption spectra. The refractive indices of SiON films with different O/N ratios spanned from 1.47 to 1.93 were realized by judiciously adjusting the pertinent PECVD gas flow rates. Next, the integrated 1-to-8 and 1-to-16 multimode interference (MMI) power beam splitters were designed and fabricated based on the numerical simulation using beam propagation method (BPM). The normalized light intensities varied from ${\sim}0.92$ to 1 and from ${\sim}0.88$ to 1 for symmetrical $1\times 8$ and $1\times 16$ devices, which correspond to the maximum power imbalances of 0.38 and 0.56 dB, respectively. Finally, the ramification of varying the width of multimode waveguide section was also investigated numerically using BPM technique.

• 2007-04-30

著者

• Chuang Ricky

  Institute Of Microelectronics & Department Of Electrical Engineering National Cheng Kung Univers

• Liao Zhen-liang

  Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn

• Liao Zhen-Liang

  Institute of Microelectronics, Department of Electrical Engineering, and Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan

• Chang Chih-Kai

  Institute of Electro-Optical Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan

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