Fabrication and Characterization of InP-Based Quantum Cascade Distributed Feedback Lasers with Inductively Coupled Plasma Etched Lateral Gratings
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概要
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We present details of the fabrication and operating characteristics of quantum cascade distributed feedback lasers with lateral gratings. These devices emit light with a wavelength of ${\sim}10$ μm and operate with pulsed drive current above room temperature. InP-based material offers significant advantages over the GaAs system for mid-infrared quantum cascade lasers. High performance, single-mode lasers are achieved using InP-based material grown by metal organic vapor phase epitaxy and utilising double-sided lateral gratings. The deeply etched gratings were made possible by the development of a high aspect ratio, multi-stage, inductively coupled plasma (ICP) etch process, using Cl2/Ar and SiCl4/Ar gas mixtures. Threshold current density was measured to be ${\sim}5.5$ kA/cm2 at a temperature of 293 K. Side mode suppression ratios ${>}20$ dB and a tuning coefficient of $-0.067$ cm-1 K-1 were observed.
- 2007-04-30
著者
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Hogg Richard
Epsrc National Centre For Iii-v Technologies Department Of Electronic & Electrical Engineering U
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Krysa Andrey
Epsrc National Centre For Iii-v Technologies Department Of Electrical And Electronic Engineering Uni
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Groom Kristian
EPSRC National Centre for III-V Technologies, University of Sheffield, Sir Frederick Mappin Building, Mappin Street, Sheffield S13 JD, U.K.
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Groom Kristian
EPSRC National Centre for III–V Technologies, Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Street, Sheffield S1 3JD, United Kingdom
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Krysa Andrey
EPSRC National Centre for III-V Technologies, University of Sheffield, Sir Frederick Mappin Building, Mappin Street, Sheffield S13 JD, U.K.
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Kennedy Kenneth
EPSRC National Centre for III-V Technologies, University of Sheffield, Sir Frederick Mappin Building, Mappin Street, Sheffield S13 JD, U.K.
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Revin Dmitry
Department of Physics and Astronomy, University of Sheffield, Sheffield S3 7RH, U.K.
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Wilson Luke
Department of Physics and Astronomy, University of Sheffield, Sheffield S3 7RH, U.K.
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Cockburn John
Department of Physics and Astronomy, University of Sheffield, Sheffield S3 7RH, U.K.
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Hogg Richard
EPSRC National Centre for III-V Technologies, University of Sheffield, Sir Frederick Mappin Building, Mappin Street, Sheffield S13 JD, U.K.
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Hogg Richard
EPSRC National Centre for III–V Technologies, Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Street, Sheffield S1 3JD, United Kingdom
関連論文
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- Fabrication and Characterization of InP-Based Quantum Cascade Distributed Feedback Lasers with Inductively Coupled Plasma Etched Lateral Gratings
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