Postfitting Control Scheme for Periodic Piezoscanner Driving

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概要

• 論文の詳細を見る

• The hysteresis and other nonlinear properties of piezoelectric scanners cause image distortion in scanning probe microscopy (SPM). Two types of control algorithm, feedback and feedforward, were applied to solve this problem. In general, a feedforward control method has a higher scanning speed, a higher resolution, but a lower accuracy than a feedback control method. In this paper, we propose a postfitting control scheme for driving the $x$-scanner of SPM periodically. This method possesses the advantages of both the feedback and feedforward methods, and achieves a higher image resolution and a higher accuracy than a pure feedback or feedforward method, without sacrificing scanning speed.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-03-15

著者

• Fu Li-chen

  Department Of Electrical Engineering National Taiwan University

• Hwang Ing-shouh

  Institute Of Physics Academia Sinica Nankang

• Hwang Ing-Shouh

  Institute of Physics, Academia Sinica, Taipei 115, Taiwan, R.O.C.

• Hwu En-Te

  Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan, R.O.C.

• Hung Shao-Kang

  Department of Electrical Engineering, National Taiwan University, Taipei 106, Taiwan, R.O.C.

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