Optical and Mechanical Property Changes in Thin-Film Filters with Post Deposition Thermal Treatments

概要

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In this paper, we report the effects of two types of filter with post deposition thermal treatments: one effect is the central wavelength of thin-film narrow-band-pass filters increasing with increasing post-deposition annealing temperature above 250 °C, which is a permanent bake-shift effect. It therefore appears possible to "tune" the stress of narrow-band-pass filters by this post-deposition annealing to shift center wavelength. The other effect is the position of T50% wavelength of a dichroic mirror shifting with increasing substrate temperature, which is the condition under which that dichroic mirror operates inside a projector. A dichroic mirror was deposited on different types substrate for comparison of the amplitude of T50% wavelength shift. We can predict the shifts in wavelength and choose the most appropriate substrate material for a dichroic mirror to obtain a T50% wavelength change minimum, i.e., to avoid a color change of the projection image. Mechanical properties such as stresses in Ta2O5, TiO2, Nb2O5, and SiO2 single layer films fabricated by different deposition processes are investigated in this study.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-03-15