Optical Properties of Surface Micromachining with Randomly Distributed Etch Holes
スポンサーリンク
概要
- 論文の詳細を見る
Optical micromachining or microelectromechanical systems (MEMS) typically require etch holes to reduce the time required to release the micromechanical structure during the sacrificial undercutting. However, high-order diffraction beams generated by the periodic etch-hole array often deteriorate the optical performance by generating noise and erroneous crosstalk signals in most optical systems. In this study, we examined the diffraction from a perforated micromirror and proposed a random distributed etch-hole layout. Due to the superposition of cosine functions with random periods, noise caused by high-order beams can be averaged effectively.
- 2006-02-15
著者
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Lee Chi-hung
Department Of Chemical Engineering National Yunlin University Of Science And Technology
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Tien Chung-Hao
Department of Photonics and Display Institute, National Chiao Tung University, Hsinchu 30010, Taiwan, R.O.C.
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Lee Chi-Hung
Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung Univeristy, Hsinchu, Taiwan, 30010, R.O.C.
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Tien Chung-Hao
Department of Photonics and Display Institute, National Chiao Tung Univeristy, Hsinchu, Taiwan, 30010, R.O.C.
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