Optical Breakdown of 6H SiC Induced by Wavelength-Tunable Femtosecond Laser Pulses
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概要
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The damage mechanisms and micromachining of 6H SiC are studied by using femtosecond laser pulses at wavelengths between near infrared (NIR) and near ultraviolet (NUV) delivered from an optical parametric amplifier (OPA). Our experimental results indicate that high quality microstructures can be fabricated in SiC crystals. On the basis of the dependence of the ablated area and the laser pulse energy, the threshold fluence of SiC is found to increase with the incident laser wavelength in the visible region, while it remains almost constant for the NIR laser. For the NIR laser pulses, both photoionization and impact ionization play important roles in electronic excitation, while for visible lasers, photoionization plays a more important role.
- 2006-01-15
著者
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Kuroda Hiroto
The Institute For Solid Stale Physics The University Of Tokyo
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Xu Zhizhan
State Key Laboratory Of High Field Laser Physics Shanghai Institute Of Optics And Fine Mechanics Cas
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Zhao Fuli
State Key Laboratory of Optoelectronic Materials and Technologies, Institute of Optoelectronic and Functional Composite Materials, School of Physics and Engineering, Sun Yat-Sen (Zhongshan) University, Guangzhou 510275, P. R. China
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Huang Min
State Key Laboratory of Optoelectonic Materials and Technologies, Zhongshan University, Guangzhou 510275, China
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Kuroda Hiroto
The Institute for Solid State Physics, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8581, Japan
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Chen Hongxin
State Key Laboratory of Optoelectonic Materials and Technologies, Zhongshan University, Guangzhou 510275, China
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Jia Tianqing
The Institute for Solid State Physics, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8581, Japan
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Zhao Fuli
State Key Laboratory of Optoelectonic Materials and Technologies, Zhongshan University, Guangzhou 510275, China
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