Reduction of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light
スポンサーリンク
概要
- 論文の詳細を見る
The suppression of acoustic waves caused by discharge in a laser chamber, which is a technical challenge we face in the development of next-generation 6 kHz ArF lasers for lithography, is studied. In this paper, we describe, firstly, that the acoustic waves produced in an ArF laser medium were observed by a Schlieren method and analyzed by computer simulation. The simulation results successfully explained the gas density fluctuation pattern obtained in Schlieren photographs. On the basis of these results, the inner configuration of a laser chamber for 6-kHz-repetition-rate operation was newly designed. The new laser chamber provided narrow-bandwidth laser light up to a repetition rate of 6 kHz as a result of a marked suppression of acoustic waves.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-15
著者
-
SAKAI Yosuke
Hokkaido University
-
Kakizaki Koji
GT Development Project, in cooperation with Ushio Inc., Komatsu Ltd., and Gigaphoton Inc., 400 Yokokurashinden, Oyama, Tochigi 323-8558, Japan
-
Yabu Takayuki
Komatsu Ltd., Research Division, 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
-
Hori Tsukasa
Komatsu Ltd., Research Division, 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
-
Mizoguchi Hakaru
GT Development Project, in cooperation with Ushio Inc., Komatsu Ltd., and Gigaphoton Inc., 400 Yokokurashinden, Oyama, Tochigi 323-8558, Japan
-
Sakai Yosuke
Hokkaidou University, North 13 West 8, Kita-ku, Sapporo 060-8628, Japan
関連論文
- 1D fluid modeling of Xe/Ar/Ne filled PDP
- Preface to Special Issue on "Technology 2004 : Reviews & Forecasts"
- Reduction of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light