New Topographic Method of Detecting Microdefects Using Weak-Beam Topography with White X-Rays

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概要

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• We describe a new topographic method of detecting microdefects in nearly perfect crystals. By this method, faint kinematical images of microdefects are observed with minimized dynamical background intensity using the interference effects of X-rays in a sample crystal. We demonstrate the capability of the method by observing “A-swirl” defects in floating-zone (FZ) silicon. The dynamical background intensity is markedly reduced, and weak kinematical images could be observed.

• 2005-06-15

著者

• KIMURA Shigeru

  Materials Science Division, Japan Synchrotron Radiation Research Institute (JASRI, SPring-8)

• Chikaura Yoshinori

  Graduate School Of Engineering Kyushu Institute Of Technology

• Kimura Shigeru

  Materials Science Division, Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Mikazuki, Sayou, Hyogo 679-5198, Japan

• Kajiwara Kentaro

  Materials Science Division, Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Mikazuki, Sayou, Hyogo 679-5198, Japan

関連論文

• Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O_3 Film by Metalorganic Chemical Vapor Deposition
• New Topographic Method of Detecting Microdefects Using Weak-Beam Topography with White X-Rays
• Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3 Film by Metalorganic Chemical Vapor Deposition

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