Characterization of MgxZn1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium
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概要
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MgxZn1-xO films were successfully grown on $a$-plane sapphire ($11\bar{2}0$) substrates by remote-plasma-enhanced metalorganic chemical vapor-deposition (RPE-MOCVD) using diethyl zinc (DEZn) and bis-ethylcyclopentadienyl magnesium (EtCp2Mg). By increasing magnesium content in the films, the crystal structure was shifted through a mixed state from wurtzite to rock salt. The optical band-gap of the films at nearly 3.28 eV was shifted to 3.69 eV by alloying with magnesium depending on the alloy composition. Both optical absorption edges and emission peaks of MgxZn1-xO films shifted to higher energy when the magnesium content at room temperature was increased, showing alloy broadening. The Stokes' shift of wurtzite MgxZn1-xO alloy films was quantitatively evaluated. The results are relevant to exciton localization.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-10-15
著者
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NAKAMURA Atsushi
Graduate School of Electronic Science and Technology, Shizuoka University
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TEMMYO Jiro
Graduate School of Electronic Science and Technology, Shizuoka University
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Aoki Toru
Graduate School Of Electronic Science And Technology Shizuoka University
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Ishihara Junji
Research Institute Of Electronics Shizuoka University
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Yamamoto Kenji
Reseach Institute of Electronics, Shizuoka University, Hamamatsu 432-8011 Japan
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Yamamoto Kenji
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan
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Temmyo Jiro
Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan
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Ishihara Junji
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan
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Aoki Toru
Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan
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- Retraction: “Characterization of MgxZn1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium”
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