Fabrications of Pb(Sc1/2Nb1/2)O3/xPbTiO3 Thin Films and Their Structural Characterizations

概要

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Highly oriented Pb(Sc1/2Nb1/2)O3 (PSN) and Pb(Sc1/2Nb1/2)O3/43%PbTiO3 (PSN/43%PT) thin films were fabricated on MgO and SrTiO3 (001) substrates by pulsed laser deposition (PLD) technique. La1/2Sr1/2CoO3 was deposited on the substrate as a bottom electrode layer for dielectric measurements. The orientation of the films was checked by X-ray diffraction method, and is found to be well oriented along the $c$-axis for PSN and PSN/PT. Film thickness was determined by the Laue oscillation of X-ray diffraction profile. This enables us to determine the number of pulses for stacking one layer of PSN and PSN/PT thin films. The temperature dependences of lattice constants of PSN and PSN/PT thin films were determined. They exhibit small but clear changes at almost the same temperature as that of the ferroelectric transition points of PSN and PSN/PT ceramics. The surface roughness of these films was observed using atomic force and scanning electron microscopes. Temperature change of dielectric constant $\varepsilon$ and $D$-$E$ hysteresis loop were determined for PSN and the real part of $\varepsilon$ shows 850.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2004-09-15