Crystal Structure and Dielectric Properties of Radio Frequency Magnetron Sputtered Nanocrystalline SrTiO3 Thin Films

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概要

• 論文の詳細を見る

• Nanocrystalline SrTiO3 thin films have been successfully deposited by radio frequency (RF) magnetron sputtering. The perovskite phase was obtained for the SrTiO3 thin films deposited on Pt/Ti/SiO2/Si substrates at 500°C. The SrTiO3 thin films deposited at 500°C were composed of granular crystallites with a size of approximately 35 nm and a thickness of 150 nm. The crystallite size increases with increasing film thickness. The dielectric constant of SrTiO3 thin films decreases with decreasing film thickness by changing the temperature, frequency and bias voltage.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-09-15

著者

• Hsiao Fu-yuan

  Department Of Materials Science And Engineering National Chen Kung University

• Wang Moo-chin

  Department Of Mechanical Engineering National Kaohsiung Institute Of Technology

• Huang Hong-hsin

  Department Of Electrical Engineering Cheng Shiu University

• Wang Moo-Chin

  Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien-Kung Road, Kaohsiung 80782, Taiwan

• Wu Nan-Chun

  Department of Materials Science and Engineering, National Cheng Kung University, 1 Ta-Hsueh Road, Tainan70101, Taiwan

• Hsiao Fu-Yuan

  Department of Materials Science and Engineering, National Cheng Kung University, 1 Ta-Hsueh Road, Tainan70101, Taiwan

• Huang Hong-Hsin

  Department of Electrical Engineering, Cheng Shiu University, 840 Cheng-Ching Road, Niaosung Hsiang, Kaohsiung 83342, Taiwan

• WANG Moo-Chin

  Department of Fragrance and Cosmetic Science, Kaohsiung Medical University

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