A New Surface Modification Method to Prevent the Release-Stiction of Micromechanical Structures during HF Vapor-Phase Etching

概要

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A novel release process without stiction problem is a major concern in surface micromachining technology to fabricate microelectromechanical systems (MEMS) devices. HF vapor-phase etching (VPE) has been focused as a promising dry process to remove sacrificial SiO2 layer, but still has limitation due to water condensation. We have first demonstrated the effectiveness of a new surface modification method using strongly hydrophilic materials (i.e., Ti, Al2O3) in preventing the release-stiction during HF VPE process. The role of hydrophilic surface layer is proposed to suppress the water bridging causing a attractive capillary force between micromechanical and stationary structures.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2004-09-15