High Resolution Readout Using a Near-Field Optical Probe Embedded in a Condensed Lens
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概要
- 論文の詳細を見る
We have developed a novel head structure with an embedded near-field optical probe in a solid immersion lens system. This head structure is suitable for optical probe detection using Scanning Interferometric Apertureless Microscope (SIAM) technology. We fabricated a hemispherical lens with an embedded near-field optical probe. The dielectric coupling between probe and medium generates a signal beam with a scattered field which results in a small phase shift. We can observe the surface features of the medium by detecting the degree of phase. In this way, periodic signals from lands shorter than the optical cutoff can be detected. The signal intensity decreases to $1/\mathrm{e}^{2}$ with a spacing of 60 nm. The detected signals are generated by the near-field optical probe.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-07-15
著者
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Mishima Akio
Tera Bytes Memory Development Department Core Technology Development Group Micro Systems Network Com
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Watanabe Kenjiro
Tera Bytes Memory Development Department Core Technology Development Group Corporate R&d Sony Co
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Watanabe Kenjiro
Tera Bytes Memory Development Department, Core Technology Development Group, Micro Systems Network Company, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Mishima Akio
Tera Bytes Memory Development Department, Core Technology Development Group, Micro Systems Network Company, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Kojima Naoto
Tera Bytes Memory Development Department, Core Technology Development Group, Micro Systems Network Company, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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