Structure of Atomically Smoothed LiNbO3 (0001) Surface

概要

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LiNbO3 (LN) is a substrate material used extensively for various optical or piezoelectric devices. We investigated an atomic-scale smoothing process of a LN single-crystal (0001) surface. Atomic force microscopy (AFM) observation revealed a surface morphology flattened from threefold symmetry to a step-terrace structure. The marked change of the surface was found to be dominated by a balance of surface diffusion and crystal growth within a period of 1–5 hours. An atomically flat surface with a straight and single-step height of 0.22 nm was obtained for a conventional LN substrate on the market. Next, we evaluated the surface composition and structure of the atomically flat LN (0001) surface by coaxial-impact collision ion scattering spectroscopy (CAICISS). We found that the atomically smoothed surface was terminated by a Nb atomic layer in which the Nb atoms were not shifted from the bulk position.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2004-04-15