Calibrations of Phase Modulation Amplitude of Photoelastic Modulator

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概要

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• A multiple harmonic intensity ratio technique is proposed for calibrating the modulation amplitude ($\Delta_{0}$) of a photoelastic modulator (PEM). A data acquisition system is utilized to investigate the frequency response of this technique. $\Delta_{0}$ determined by this technique is independent of frequency, which is proved using the reflection and transmission setups. In addition to confirm our calibration using the digitized oscilloscope waveform, we also obtain a set of ellipsometric parameters under various values of $\Delta_{0}$ before and after calibration. We also introduce a correction factor to correct the effect caused by the shift of the modulation amplitude in the process of etching. An optical thick film is used to calibrate $\Delta_{0}$ using PEM ellipsometry, and its refractive index and extinction coefficient are also obtained in etching. Finally, we suggest the use of the traces of the ellipsometric parameters under various thicknesses for monitoring instead of calculating the thickness in real time.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-02-15

著者

• Wang Meng-wei

  Institute Of Electro-optical Engineering National Chiao Tung University

• Lin Tsang-lang

  Engineering And System Science National Tsing Hwa University

• Chao Yu-faye

  Institute Of Electro-optical Engineering National Chiao Tung University

• Liu Yu-Wei

  Engineering and system Science, National Tsing Hwa University, Hsinchu, Taiwan, R. O. C.

• Lin Tsang-Lang

  Engineering and system Science, National Tsing Hwa University, Hsinchu, Taiwan, R. O. C.

• Leou Keh-Chyang

  Engineering and system Science, National Tsing Hwa University, Hsinchu, Taiwan, R. O. C.

• Tsai Fei-Hsin

  Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan, R. O. C.

• Chen Shu-Shien

  Engineering and system Science, National Tsing Hwa University, Hsinchu, Taiwan, R. O. C.

• Wang Meng-Wei

  Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan, R. O. C.

関連論文

• Azimuth Alignment in Photoelastic Modulation Ellipsometry at a Fixed Incident Angle(Instrumentation, Measurement, and Fabrication Technology)
• A Direct Determination Technique for Azimuth Alignment in Photoelastic Modulation Ellipsometry
• Measurement of Optical Activity using a Photoelastic Modulator System
• Direct Determination of Azimuth Angles in Photoelastic Modulator System
• Calibrations of Phase Modulation Amplitude of Photoelastic Modulator

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