The Influence of Various Upper Electrodes on Fatigue Properties of Perovskite Pb(Zr,Ti)O3 Thin Films
スポンサーリンク
概要
- 論文の詳細を見る
Ferroelectric thin films of Pb(Zr,Ti)O3 (PZT) were prepared by chemical solution deposition (CSD). The top electrodes of platinum (Pt), SrRuO3 (SRO), and IrO2 thin films are deposited on the PZT thin films by RF magnetron sputtering (RF) and the pulsed laser deposition (PLD) methods, respectively. The polarization fatigue of ferroelectric thin-film capacitors is investigated. As a result, the remanent polarization value of the PZT thin films of SRO/PZT/PT/Pt/TiOx/SiO2/Si and IrO2/PZT/PT/Pt/TiOx/SiO2/Si remains more than $10^{11}$ switching cycles at constant value and the value of the PZT thin films of Pt/PZT/PT/Pt/TiOx/SiO2/Si decreases to approximately 50% of its initial value at $10^8$ cycles. It is confirmed that polarization fatigue is improved using SRO and IrO2 thin-film electrodes as top electrodes.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
-
NOZAKA Takashi
Department of Electrical and Electronics Engineering, Graduate school, Hachinohe Institute of Techno
-
Masuda Yoichiro
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University
-
Masuda Yoichiro
Department of Electronic Intelligence Systems, Faculty of Engineering, Hachinohe Institute of Technology, 88-1, Ohbiraki, Myo, Hachinohe, Aomori 031-8501, Japan
-
Nozaka Takashi
Department of Electronic Intelligence Systems, Faculty of Engineering, Hachinohe Institute of Technology, 88-1, Ohbiraki, Myo, Hachinohe, Aomori 031-8501, Japan
関連論文
- Synthesis of BaTiO_3 Thin Films Substituted with Hafnium and Zirconium by a Laser Ablation Method Using the Fourth-harmonic Wave of a YAG Laser
- Optical Properties of Ba_2NaNb_5O_ Film Fabricated by RF Magnetron Sputtering Method
- Preparation of Ba_2NaNb_5O_ Film by RF Magnetron Sputtering Method
- Crystal Growth, Dielectric and Polarization Reversal Properties of Bi_4Ti_3O_ Single Crystal
- Preparation and Dielectric and Electrooptic Properties of Bi_4Ti_3O_ Films by Electron Cyclotron Resonance plasma Sputtering Deposition : Thin Films
- Preparation of La-Modified Lead Titanate Film Capacitors and Influence of SrRuO_3 Electrodes on the Electrical Properties
- Electronic Structures of Bi_4Ti_3O_ Thin Film and Single Crystal Determined by Resonant Soft-X-Ray Emission Spectroscopy
- Preparation and Properties of Bi_2SiO_5/Si Structures
- D.C Bias and Frequency Dependence of the Dielectric Constant PZT Family ferroelectric Ceramics : F: Ferroelectric Materials
- Electric Field-Induced Strain Effects of Pb(Zr, Ti)O_3 Family Ceramics : A: Applications and Fundamentals
- Leakage Current Properties of PZT Thin Film Capacitors
- Ferroelectric and Pyroelectric Properties of Ba_Pb_x Ti_(Hf_,Zr_)_O_3 Thin Films : Electrical Properties of Condensed Matter
- Preparation and Ferroelectric Properties of Ti-Site Substituted BaTiO_3 Thin Films
- Properties and Degradation of Polarization Reversal of Soft BaTiO_3 Ceramics for Ferroelectric Thin-Film Devices
- Dielectric and Piezoelectric Properties of Polycrystalline Pb_(La_x・Li_)_Zr_・Ti_O_3 Ceramics : T: THIN FILM
- A Double-Layer Electrically Controlled Birefringence Liquid-Crystal Display with a Wide-Viewing-Angle Cone
- Tilted Homeotropic Alignment of Liquid-Crystal Molecules Using the Rubbing Method
- Alignment of Liquid Crystals on a Ferroelectric Transparent Ceramic Plate : L: LIQUID CRYSTALS
- Alignment of Ferroelectric Liquid Crystals on a Ferroelectric Transparent Ceramic Plate : L: Liquid Crystals
- The Influence of Various Upper Electrodes on Fatigue Properties of Perovskite Pb(Zr,Ti)O_3 Thin Films
- The Polarization-Reversal Characteristics of Pb(Zr, Ti)O_3 Family Ceramics : O: OPTOELECTRONICS
- Second Harmonics Generation from Transparant PLLZT Ceramics Excited by a Q-Switched Nd^ Glass Laser : OPTOELECTRONICS
- Electro-Optic Properties of FE/PC Sandwich Memory Device : OPTOELECTRONICS
- Variation of Dielectric Constant Affected by Domain Structure and Electric-Field-Induced Strain in Ferroelectric Ceramics ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Structural and Ferroelectric Properties of Ba2NaNb5O15 Thin Films on La-Doped SrTiO3 Substrates
- The Influence of Various Upper Electrodes on Fatigue Properties of Perovskite Pb(Zr,Ti)O3 Thin Films