Application of a Fringe Capacitive Sensor to Small-Distance Measurement

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概要

• 論文の詳細を見る

• In this paper, we used a fringe capacitive sensor to measure a short-distance variation of a target. High-precision displacement measurement was carried out based on the small fringing capacitance of the sensor measured. Sensing sensitivity was 38 μV/μm when the measurement was carried out in the distance range from 75 to 150 μm, which is the distance range between the sensor and the target. The sensitivity of the fringing capacitor is affected by its dimension, linewidth, and pattern. A printed circuit board (PCB)-based fabrication process was used to fabricate fringing capacitive sensors of various patterns. A simple and low cost sensing circuit transformed fringing capacitances into voltage output signal, which is also called capacitance-to-voltage ($C/V$) conversion. We accomplished the short-distance measurement with precision up to a submicron level.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-09-15

著者

• Wang Shih-ming

  Institute Of Electronic Engineering National Yunlin University Of Science And Technology

• Chou Jung-chuan

  Institute Of Electronic And Information Engineering National Yunlin University Of Science And Techno

• Chou Jung-Chuan

  Institute of Electronic Engineering, National Yunlin University of Science and Technology, Touliu, Yunlin, Taiwan 640, R.O.C.

• Wang Dau-Chung

  Institute of Mechanical Engineering, National Yunlin University of Science and Technology, Touliu, Yunlin, Taiwan 640, R.O.C.

• Lu Po-Lun

  Institute of Mechanical Engineering, National Yunlin University of Science and Technology, Touliu, Yunlin, Taiwan 640, R.O.C.

• Liao Lan-Pin

  Institute of Electronic Engineering, National Yunlin University of Science and Technology, Touliu, Yunlin, Taiwan 640, R.O.C.

• Wang Shih-Ming

  Institute of Electronic Engineering, National Yunlin University of Science and Technology, Touliu, Yunlin, Taiwan 640, R.O.C.

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