High-Resolution Pattern Reproduction by Cold Ultra Violet Stamping in Optical Polymeric Films
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概要
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In this paper, we present a new method of waveguide-type device fabrication using an optical polymer. This method is applied to the fabrication of a grating on top of a polymeric waveguide film where, we used a mixture of pentaerythritol triacrylate, N-methyldiethanolamin, and eosin as a polymer material. This mixture, called henceforward PNME, acts as a negative-type photoresist polymeric material. Exposure of the material to light of specific wavelength makes the material solidify. Using this particular property of PNME and the fact that before the solidification PNME material is liquid, and thus copies the volume of the vessel where it is contained, we were able to fabricate polymeric films and waveguides with a relief grating on their surfaces. It was also determined that the interface between the side walls of the vessel and the PNME material plays a vital role in the fabrication process. Moreover, the presented method of fabrication is a high-resolution, high-output, and low-cost method of optical device fabrication and thus it is particularly suitable for commercial use.
- 2003-04-15
著者
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OKAMOTO Naomichi
Graduate School of Electronic Science and Technology, Shizuoka University
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Gustafik Pavol
Graduate School Of Electronic Science And Technology Shizuoka University
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SUGIHARA Okihiro
Graduate School of Electronic Science and Technology, Shizuoka University
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FUJIMURA Hisashi
Graduate School of Electronic Science and Technology, Shizuoka University
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Gustafik Pavol
Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan
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Okamoto Naomichi
Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan
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Sugihara Okihiro
Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan
関連論文
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