Analysis of Defects in Polycrystalline Silicon Thin Films Using Raman Scattering Spectroscopy

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概要

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• We investigated defects in polycrystalline silicon (poly-Si) for thin-film transistors using Raman-scattering spectroscopy, where poly-Si films were fabricated by solid-phase crystallization (SPC) and excimer-laser annealing (ELA). Defects were characterized by the optical-phonon mode at ${\sim}520$ cm-1 and local-vibration modes (LVMs). LVMs were induced by termination of dangling bonds at defects with hydrogen atoms using a catalytic-hydrogenation technique. Two dominant LVMs of Si–H bond stretching modes were detected for poly-Si films at 2000 and 2100 cm-1. The 2000 cm-1 band was attributed to dangling bonds at grain boundaries. The dangling bonds are identical to those observed by electron spin resonance. The 2100 cm-1 band was detected only for ELA and related to atomic vacancies left by rapid cooling after laser irradiation. It was shown that the width of the optical-phonon mode is enlarged by the presence of intragrain defects and correlates with the 2100 cm-1 band intensity in some cases. The relationship between dangling bonds and ordering of amorphous Si at the initial stage of SPC was also shown.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-11-15

著者

• Katoh Yoshihiro

  Interdisciplinary Faculty Of Science And Engineering Shimane University

• KITAHARA Kuninori

  Interdisciplinary Faculty of Science and Engineering, Shimane University

• YAMAZAKI Ryosuke

  Interdisciplinary Faculty of Science and Engineering, Shimane University

• KUROSAWA Toshitaka

  Komatsu Ltd.

• Ohnishi Kazuma

  Interdisciplinary Faculty Of Science And Engineering Shimane University

• Kitahara Kuninori

  Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060, Nishi-Kawatsu, Matsue, Shimane 690-8504, Japan

• Yamazaki Ryosuke

  Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060, Nishi-Kawatsu, Matsue, Shimane 690-8504, Japan

• Katoh Yoshihiro

  Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060, Nishi-Kawatsu, Matsue, Shimane 690-8504, Japan

• Ohnishi Kazuma

  Interdisciplinary Faculty of Science and Engineering, Shimane University, 1060, Nishi-Kawatsu, Matsue, Shimane 690-8504, Japan

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