Study of the Crystal Size Effect on Spatial Resolution in Three-Dimensional Measurement of Fine Electromagnetic Field Distribution by Optical Probing
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概要
- 論文の詳細を見る
The effect of crystal size on the spatial resolution of electro/magneto-optic probing measurement has been studied. This is especially important when one deals with three-dimensional field visualization over fine and complicated circuit patterns. Through experimental three-dimensional field analyses, the concept of the sensitive volume is introduced and has been proved to be an appropriate measure to define the three-dimensional spatial resolution. Based upon the reduction of the sensitive volume of a magneto-optic crystal, a magnetic field distribution over a 10-μm-class miniature circuit was precisely visualized in the $x$–$z$ plane by the fiber edge magneto-optic probe using a 20-μm-thick crystal.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-10-15
著者
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Kishi Masato
Department Of Applied Physics University Of Tokyo
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YAMAZAKI Etsushi
Department of Electronic Engineering, The University of Tokyo
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WAKANA Shinichi
Department of Electronic Engineering, The University of Tokyo
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Tsuchiya Masahiro
Department of Electronic Engineering, The University of Tokyo, 7-3-1 Hongo, Tokyo 113-8656, Japan
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Tsuchiya Masahiro
Department of Aging and Geriatric Dentistry, Graduate School of Dentistry, Tohoku University
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Wakana Shinichi
Department of Electronic Engineering, the University of Tokyo, 7-3-1 Hongo, Tokyo 113-8656, Japan
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Yamazaki Etsushi
Department of Electronic Engineering, the University of Tokyo, 7-3-1 Hongo, Tokyo 113-8656, Japan
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Iwanami Mizuki
Association of Super-Advanced Electronics Technologies, 2-1-6 Sengen, Tsukuba 305-0047, Japan
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Hoshino Shigeki
Association of Super-Advanced Electronics Technologies, 2-1-6 Sengen, Tsukuba 305-0047, Japan
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