Fundamental Study of a Stacked Lithium Niobate Transducer

概要

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Generally, a lead zirconate titanate ceramic is utilized for a high-power transducer such as an ultrasonic motor drive. However, it is difficult to realize an ultrasonic motor that can withstand a high temperature, above 500°C. We focused on lithium niobate because it has a high Curie temperature (1210°C) and high quality factor. The electromechanical coupling factor of lithium niobate is large, although the permittivity is one hundred times smaller compared to that of hard-type lead zirconate titanate (PZT)-8. Hence a stacked structure is required to generate high output power. Dimensions of the fabricated actuator were 10 mm square and 18.5 mm long. The number of lithium niobate layers was 18. The calculated force factor of this transducer was 0.28 N/V, a value comparable to that of the bolted Langevin transducer using PZT, though the vibration velocity was saturated at 0.12 m/s. To realize improved transducer performance, we are attempting to fabricate a new transducer that can generate high vibration velocity.
Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
2001-05-30