Film Density Dependence of Polymethylmethacrylate Ablation under Synchrotron Radiation Irradiation

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概要

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• Variations in the etch depth and refractive index of polymethylmethacrylate (PMMA) films of different molecular weights after synchrotron radiation (SR) irradiation are investigated. Reduction of the PMMA film molecular weight, density and thickness are observed after SR irradiation. The amount of film thickness loss depends on not only initial molecular weight but also film density. The PMMA density difference at the start of SR exposure affects the etch depth after SR ablation.

• 2001-02-15

著者

• Choi Jae-young

  Pohang Accelerator Laboratory Postech

• Hattori Reiji

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Hidaka Masanori

  Department Of Physics Faculty Of Science Kyushu University

• Kuroki Yukinori

  Department Of Electronic Device Engineering Kyushu University

• Ikeda Akihiro

  Department Of Neurosurgery Saitama Medical School Hospital

• CHANG Suk

  Pohang Accelerator Laboratory, POSTECH

• HISAKADO Tohru

  Department of Electronics, Graduate School of Information Science and Electrical Engineering, Kyushu

• HAKIAI Yousuke

  Department of Physics, Graduate School of Science, Kyushu University

• Fujimura Tsuyoshi

  Department Of Electronics Graduate School Of Information Science And Electrical Engineering Kyushu U

• Ikeda Akihiro

  Department of Electronics, Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 812-8581, Japan

• Chang Suk

  Pohang Accelerator Laboratory (PAL), Pohang University of Science and Technology (POSTECH), Pohang, Gyeongbuk 790-784, Korea

• Hisakado Tohru

  Department of Electronics, Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 812-8581, Japan

• Hidaka Masanori

  Department of Physics, Graduate School of Science, Kyushu University, Fukuoka 812-8581, Japan

• Hakiai Yousuke

  Department of Physics, Graduate School of Science, Kyushu University, Fukuoka 812-8581, Japan

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