Studies of Pulsed Laser Deposition Mechanism of WO3 Thin Films
スポンサーリンク
概要
- 論文の詳細を見る
The growth dynamics of WO3 thin films by laser ablation of a WO3 monoclinic phase target was studied. Space and time-resolved optical spectra indicated the presence of neutral (WI), ionized (WII) and electronically excited molecule (WO) species in the plume. The reaction between W and O2 was manifested in the laser deposition. Raman spectra showed the films deposited over a target-substrate distance longer than 5 cm or (/and) under an ambient oxygen pressure lower than 200 mTorr deviated from the monoclinic phase of the target with shortened and bent bonds. This was due to the insufficient surface or (/and) gas oxidation. The oxygen pressure and the target-substrate distance were found to be important features in the stoichiometric and monoclinic phase formation. Both gas and surface reactions were responsible for the ultimate monoclinic phase formation in the pulse laser deposition. Parameters were optimised for the oxygen pressure and target-substrate distance.
- 2001-01-15
論文 | ランダム
- Ebstein畸型15例について : 第32回日本循環器学会関東甲信越地方会
- 37)両大血管右室起始症の臨床観察(第30回日本循環器学会関東甲信越北陸地方会総会)
- 低分子量蛋白尿の近位尿細管障害の指標としての意義に関する研究 (イタイイタイ病およびカドミウム中毒) -- (カドミウムの腎機能影響に関する研究--臨床的研究グループ)
- Ultra Miller法による非脱灰骨標本の作製とこれを用いた骨計測の検討 (イタイイタイ病およびカドミウム中毒) -- (カドミウムの腎機能影響に関する研究--臨床的研究グループ)
- カドミウム負荷サルのUltra Miller法による非脱灰骨標本の検討(予報) (イタイイタイ病およびカドミウム中毒) -- (カドミウムの腎機能影響に関する研究 臨床的研究グル-プ)