Low-temperature Crystallization of Metal Organic Decomposition BaTiO3 Thin Film by Hydrothermal Annealing
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概要
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BaTiO3 (BTO) thin films with perovskite structure have been prepared on Ti/Pt/Ti/SiO2/Si substrate using a combined process of conventional metal organic decomposition (MOD) process and a hydrothermal method. BTO thin films with polycrystalline structure are obtained on silicon at processing temperatures lower than 200°C. X-ray diffraction patterns show that well-developed crystallites with a pure perovskite phase have been formed. Scanning electron microscopy (SEM) and Raman spectroscopy results show that the structure of as-treated BTO thin film strongly depends on the hydrothermal treatment temperature.
- 2000-07-15
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