Spectroscopic Study of Vapor-Phase Reactions in Preparation of YBa2Cu3O7-x Oxide Thin Film Using Pulsed Laser Deposition
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概要
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Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7- x superconducting thin film are investigated using optical emission spectroscopy. Argon/oxygen gas mixtures of various ratios are used as ambient to study the formation of diatomic oxides. Most of YO and some of BaO molecules are formed in the vapor, while CuO molecules are not formed in the vapor but only ejected from the target. To obtain high-quality oxide thin films, fluxes of the oxide molecules, atoms and ions reaching a substrate, which are dependent on laser energy density, argon mixture ratio and total pressure, should be controlled.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1997-07-30
著者
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Ikegami Tomoaki
Department Of Electrical And Computer Engineering Faculty Of Engineering Kumamoto University
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Kurogi Hiromitsu
Department Of Electrical And Computer Engineering Kumamoto University
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Tsuchiya Keisuke
Department Of Electrical And Computer Engineering Kumamoto University
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Yamagata Yukihiko
Department Of Applied Science For Electronics And Materials Kyushu University
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Ebihara Kenji
Department Of Cardiology Kumamoto Saisyunsou Hospital
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Ebihara Kenji
Department of Electrical and Computer Engineering, Kumamoto University,
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Yamagata Yukihiko
Department of Electrical and Computer Engineering, Kumamoto University,
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Ikegami Tomoaki
Department of Electrical and Computer Engineering, Kumamoto University,
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Kurogi Hiromitsu
Department of Electrical and Computer Engineering, Kumamoto University,
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Tsuchiya Keisuke
Department of Electrical and Computer Engineering, Kumamoto University,
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