Fine Imaging Scanning Electron Microscope due to Secondary Electron Multiplication and Optical Configuration
スポンサーリンク
概要
- 論文の詳細を見る
We demonstrated that immediate multiplication of two-dimensional secondary electrons from a specimen and use of optical configuration provided a fine imaging scanning electron microscope yielding both low acceleration voltage and fine observation. The multiplied secondary electrons give rise to a very bright fluorescence intensity distribution due to the collision with the fluorescence-painted glass plate. Just it's center part was optically extracted using an aperture and detected by a photomultiplier. As a result, the pixel signal of the observed image achieved the highest signal-to-noise ratio. The observed image, therefore, had higher resolution and broader dynamic range. This novel method can be used to perform a fine microstructure observations of materials, using real low 1000 V primary electron acceleration.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-15
著者
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Tanno Naohiro
Graduate Program of Human Sensing and Functional Sensor Engineering, Graduate School of Engineering,
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Eguchi Usaburo
Faculty of Engineering, Yamagata University, Yonezawa, Yamagata 992, Japan
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- Fine Imaging Scanning Electron Microscope due to Secondary Electron Multiplication and Optical Configuration