Analysis of Local Lattice Strains Around Plate-Like Oxygen Precipitates in Czochralski-Silicon Wafers by Convergent-Beam Electron Diffraction
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概要
- 論文の詳細を見る
Convergent-beam electron diffraction (CBED) is used to study lattice strain around plate-like oxygen precipitates in Czochralski (CZ)-grown silicon. Local lattice strain determined from higher-order Laue zone (HOLZ) patterns shows that compressive and tensile stress fields exist near the precipitates. The spatial variation of local lattice strain and lattice rotation is visualized in a defocused large angle CBED disc, or a convergent-beam imaging (CBIM) disc.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-15
著者
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Tomokiyo Yoshitsugu
Research Laboratory Of Hvem Kyushu University
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SADAMITSU Shinsuke
Sumitomo Sitix Corp., Silicon Technology Center
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Nakashima Jyun
Sharp Fukuyama Fab.2 Process Eng.
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Nakayama Masaru
Materials Science and Metallurgical Engineering, Kurume National College of Technology, Kurume 830, Japan
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Sadamitsu Shinsuke
Sumitomo Sitix Corp., Silicon Technology Center, Saga 849-05, Japan
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Nakashima Jyun
Sharp Fukuyama, Fab. 2, Process Eng., Fukuyama 721, Japan
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Okuyama Tetsuya
Materials Science and Metallurgical Engineering, Kurume National College of Technology, Kurume 830, Japan
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Tomokiyo Yoshitsugu
Research Laboratory of High Voltage Electron Microscope, Kyushu University
関連論文
- Analysis of Local Lattice Strains Around Plate-Like Oxygen Precipitates in Czochralski-Silicon Wafers by Convergent-Beam Electron Diffraction
- Critical Voltage Effect in Ni_3Fe and FeCo Ordering Alloys
- Precipitation Behavior in a Cu-4.5 wt%Co Alloy
- Analysis of Local Lattice Strains Around Plate-Like Oxygen Precipitates in Czochralski-Silicon Wafers by Convergent-Beam Electron Diffraction
- Higher order Laue zone patterns in convergent beam electron diffraction and determinations of local lattice parameters in .ALPHA.- and .ALPHA.2-phases of a Cu-20at%Al alloy.