Grain Size Control of Diamond Membrane for X-Ray Mask by Use of Fluidized Bed Pretreatment

概要

論文の詳細を見る
Using a fluidized bed for pretreatment of the substrate and changing the nucleation density, we have controlled the grain size of 76-mm-diameter diamond membranes for X-ray lithography, formed by microwave plasma chemical vapor deposition (CVD). The nucleation density ranged from 8.4×105 mm-2 to 3.4×108 mm-2 for pretreatment time ranging from 20 min to 600 min. After pretreatment, we fabricated continuous films. The mean grain size of film fabricated after 600 min of pretreatment was 1/1.4 that of film fabricated after 20 min of pretreatment. The results of evaluation by X-ray diffraction (XRD) and Raman spectroscopy of the films after the two pretreatment times showed the same crystallinity of (111)-textured polycrystalline diamond with low impurity concentrations. A subsequent study of visible light (λ=633 nm) transmittance for free-standing membranes indicated that scattering of incident light was minimized due to the reduced grain size.
Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
1996-09-15