Simple Method of Correcting Optical Proximity Effect for 0.35 µm Logic LSI Circuits
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概要
- 論文の詳細を見る
We propose a practical optical proximity correction (OPC) system, whose characteristics are simple and effective, for logic LSI circuits and outline all the steps for OPC. We also report the improvement of gate length deviations in a logic device with OPC.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1995-12-30
著者
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MANABE Yasuo
Fujitsu Limited
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KAWAMURA Eiichi
Fujitsu Limited
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HANYU Isamu
Fujitsu Laboratories Ltd.
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HARUKI Tamae
Fujitsu Limited
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Haruki Tamae
Fujitsu Limited, 1015 Kamikodanaka, Nakahara-ku, Kawasaki 211, Japan
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Hanyu Isamu
Fujitsu Limited, 1015 Kamikodanaka, Nakahara-ku, Kawasaki 211, Japan
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- FOREWORD
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- Simple Method of Correcting Optical Proximity Effect for 0.35 µm Logic LSI Circuits