ZnS:TbOF Thin-Film Green Electroluminescent Panels Fabricated by Two-Target Sputtering

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概要

• 論文の詳細を見る

• We developed a two-target rf-magnetron sputtering system to reproducibly fabricate bright ZnS:TbOF thin-film green electroluminescent panels. ZnS and Tb are sputtered from independent targets, and the substrate moves between these targets. This results in good controllability of both ZnS thickness and Tb doping concentration. To improve luminance, we have developed a TbOF target to form efficient TbOF complex centers, and used an Ar/He mixture to avoid sputtering damage to the ZnS host. We made a prototype $640\times 200$ thin-film green electroluminescent panel to demonstrate large-area capability of this system. We also made a multicolor thin-film electroluminescence panel by arranging ZnS:TbOF and ZnS:Mn active layer segments laterally.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-08-20

著者

• MIURA Shoshin

  FUJITSU LABORATORIES LTD.

• NAKAMURA Kimiaki

  Fujitsu Limited

• OKAMOTO Kenji

  Fujitsu Limited

• Okamoto Kenji

  Fujitsu Limited, 10-1 Morinosato-Wakamiya, Atsugi 243-01

• Kobayashi Tetsuya

  Fujitsu Limited, 10-1 Morinosato-Wakamiya, Atsugi 243-01

• Yoshimi Takuya

  Fujitsu Limited, 10-1 Morinosato-Wakamiya, Atsugi 243-01

• Sato Sei

  Fujitsu Limited, 10-1 Morinosato-Wakamiya, Atsugi 243-01

関連論文

• Properties of ZnS Thin-Films Grown by Ionized-Cluster Beam Deposition
• Reflector Parameters for High Reflectance and High Contrast Ratio with White-Taylor Reflective Display
• Effects of Oxygen Doping on the Electrical and Optical Properties of Sputtered ZnS:TbOF Electroluminescent Thin Films
• Oxygen Contamination in SrS:Ce Thin-Film Electroluminescent Devices : Optical Properties of Condensed Matter
• ZnS:TbOF Thin-Film Green Electroluminescent Panels Fabricated by Two-Target Sputtering

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