The Determination Method of Accurate Electron Temperature by a Triple Probe in Plasma with Contaminants

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概要

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• With respect to obtaining an accurate electron temperature by a triple probe in a plasma containing contaminating particles, a method of determination is proposed through calculations. This method is based on the existence of various contact potential differences due to deposition of either electronegative or electropositive material on the surfaces of the probes.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-06-20

著者

• Okano Daisuke

  Department Of Electrical Engineering School Of Engineering Kyushu Tokai University

• Okano Daisuke

  Department of Electronic Engineering, Kumamoto Institute of Technology, Ikeda 4-22-1, Kumamoto 860

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• Estimated Errors in Determination of Electron Temperature for Symmetric Triple Probes Deposited with Contaminants
• The Determination Method of Accurate Electron Temperature by a Triple Probe in Plasma with Contaminants

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