Time Sequential Measurement of the Precursor State of Oxygen on the Titanium Surface by Means of Time-of-Flight Spectroscopy for Electron Stimulated Desorption

概要

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An adsorption process of oxygen on the titanium single-crystal surface of ($10\bar{1}0$) has been investigated by means of a time-of-flight spectrometer for the electron stimulated desorption (ESD). An oxidation experiment has been performed at the oxygen pressure ranging from 1 to $8\times 10^{-8}$ Torr. TOF spectra of ESD signals were obtained sequentially by a digital acquisition system. In an initial adsorption stage, the O+ ESD signal intensity grew depending on the oxygen exposure. The O+ signal peaks have the most probable kinetic energies of $3.5\pm 0.4$ eV and $1.8\pm 0.2$ eV. The higher-energy peak is identified as the ESD signal from molecularly adsorbed oxygen on the surface, and the lower one as that from the chemically adsorbed oxygen.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
1989-12-20