Dissolution Behavior of Novolak/Dissolution Inhibitor Resist Systems in an Aqueous Base Developer
スポンサーリンク
概要
- 論文の詳細を見る
In order to understand the basic mechanisms working in the dissolution of novolak/dissolution inhibitor systems model compounds have been studied in terms of their dissolution inhibition capabilities. The influences of the structure of small size molecules on the inhibition effect were examined as well as the effects of the intramolecular composition and of the molecular weight of polymeric dissolution inhibitors. The role of the novolak type in the inhibition mechanism was also investigated. It was found that an amphiphilic character of the inhibitor molecule and an appropriate structure of the novolak matrix polymer are the most important features for systems with high dissolution inhibition capability. The intramolecular composition of polymeric dissolution inhibitors also has a strong effect, whereas the molecular weight of polymeric dissolution inhibitors has less influence.
- 1989-10-20
著者
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Schlegel Leo
Central Research Laboratory Hitachi Ltd.
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UENO Takumi
Central Research Laboratory, Hitachi Ltd.
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HAYASHI Nobuaki
Central Research Laboratory, Hitachi Ltd.
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Hesp Simon
Central Research Laboratory Hitachi Ltd
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Shiraishi Hiroshi
Central Research Lab. Hitachi Ltd.
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Iwayanagi Takao
Central Research Laboratory Hitachi Ltd.
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Schlegel Leo
Central Research Laboratory, Hitachi Ltd., Higashi-Koigakubo, Kokubunji, Tokyo 185
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Ueno Takumi
Central Research Laboratory, Hitachi Ltd., Higashi-Koigakubo, Kokubunji, Tokyo 185
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Hesp Simon
Central Research Laboratory, Hitachi Ltd., Higashi-Koigakubo, Kokubunji, Tokyo 185
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Shiraishi Hiroshi
Central Research Laboratory, Hitachi Ltd., Higashi-Koigakubo, Kokubunji, Tokyo 185
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