Preparation and Properties of (NiZn)Fe2O4 Film by RF Reactive Sputtering

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概要

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• A reactive rf-sputtering method is used for depositing polycrystalline (NiZn)Fe2O4 films. The relations between the magnetic properties of the ferrite films and the sputtering conditions are examined in detail. The best condition of rf-sputtering, under which the magnetization of the films as well as the bulks is obtained and the initial relative permeabilities amount to $50\sim 100$ even in the frequency region over the Snoek's limit, is found. Finally, the way to improve the preparation of the films is discussed.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-10-20

著者

• Shirae Kimisuke

  Faculty Of Engineering Science Osaka University

• Tsujimoto Hiroaki

  Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560

• Chen Qing

  Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560

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• Preparation and Properties of (NiZn)Fe2O4 Film by RF Reactive Sputtering

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