Effect of Laser-Plasma X-Ray Irradiation on Crystallization of Amorphous Silicon Film by Excimer Laser Annealing
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概要
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The effect of laser plasma soft X-ray (LPX) irradiation on crystallization by excimer laser annealing (ELA) was investigated at low ELA energy densities. The crystalline fraction at energy densities of 50 and 60 mJ/cm2 for LPX followed by ELA is nearly equal to that at 80 to 100 mJ/cm2 for the ELA method with non-LPX irradiation. The results obtained indicate that LPX irradiation before ELA reduces the critical energy density for the start of crystallization. The combined method of LPX irradiation and ELA will enable us to realize a low-temperature process for ELA crystallization.
- 2007-11-25
著者
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HEYA Akira
Department of Materials Science & Chemistry, University of Hyogo
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Amano Sho
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
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Miyamoto Shuji
Laboratory Of Advanced Science And Technology For Industry (lasti) University Of Hyogo
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Mochizuki Takayasu
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
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Matsuo Naoto
Department Of Electrical And Electronic Engineering Yamaguchi University
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Mochizuki Takayasu
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, 3-2-1 Kohto, Kamigouri-cho, Ako-gun, Hyogo 678-1205, Japan
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Uejukkoku Kazuya
Department of Materials Science and Chemistry, University of Hyogo, 2280 Shosha, Himeji, Hyogo 671-2201, Japan
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Takanashi Yasuyuki
Department of Materials Science and Chemistry, University of Hyogo, 2280 Shosha, Himeji, Hyogo 671-2201, Japan
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Amano Sho
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, 3-2-1 Kohto, Kamigouri-cho, Ako-gun, Hyogo 678-1205, Japan
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Matsuo Naoto
Department of Electrical & Electronic Engineering, Yamaguchi University
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Matsuo Naoto
Department of Materials Science and Chemistry, University of Hyogo, 2280 Shosha, Himeji, Hyogo 671-2201, Japan
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Heya Akira
Department of Materials Science and Chemistry, University of Hyogo, 2280 Shosha, Himeji, Hyogo 671-2201, Japan
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Takanashi Yasuyuki
Department of Materials Science and Chemistry, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan
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