Characterization of Submicron-scale Periodic Grooves by Grazing Incidence Ultra-small-angle X-ray Scattering
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概要
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A grazing incidence ultra-small-angle X-ray scattering measurement system using a laboratory X-ray source has been developed. Submicron-scale artificial periodic grooves on thermally oxidized silicon wafers are characterized using this system. They are fabricated by electron beam lithography. The average pitch widths of the grooves are determined accurately with a low standard uncertainty of less than 0.02%. The cross-sectional profiles are also analyzed by intensity ratios of higher-order diffraction peaks from the periodic structures and X-ray reflectivity measurements. The obtained cross-sectional profiles are in good agreement with those obtained by atomic force microscopy.
- 2007-08-25
著者
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Wada Yasuo
Graduate School Of Interdisciplinary New Science Toyo University
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Ikeda Susumu
Department Of Applied Chemistry Faculty Of Science And Engineering Saga University
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Omote Kazuhiko
Technology and Product Development Division, Rigaku Corporation, 3-9-12 Matsubara, Akishima, Tokyo 196-8666, Japan
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Ito Yoshiyasu
Technology and Product Development Division, Rigaku Corporation, 3-9-12 Matsubara, Akishima, Tokyo 196-8666, Japan
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Inaba Katsuhiko
Technology and Product Development Division, Rigaku Corporation, 3-9-12 Matsubara, Akishima, Tokyo 196-8666, Japan
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Wada Yasuo
Graduate School of Interdisciplinary New Science, Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan
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