Femtosecond-Laser-Assisted Chemical Vapor Deposition of Cr Metal
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概要
- 論文の詳細を見る
Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)6 on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2005-04-10
著者
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Hitosugi Taro
Core Technology Development Group Micro Systems Network Company Sony Corporation
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Mizuno Takeshi
Core Technology Development Center Core Technology & Network Company Sony Corporation
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Hitosugi Taro
Core Technology Development Group, Micro Systems Network Company, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Mizuno Takeshi
Core Technology Development Group, Micro Systems Network Company, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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