Low-Damage Sputtering of GaAs and GaP Using Size-Selected Ar Cluster Ion Beams
スポンサーリンク
概要
- 論文の詳細を見る
We have investigated the irradiation damage depths produced by an Ar gas cluster ion beam (GCIB) and an Ar monomer ion beam (MIB) on GaAs and GaP, in a comparison of the cathode luminescence (CL) spectra of ion-irradiated and nonirradiated areas. The depths of irradiation damage in both substrates were estimated from the relationship between the CL intensity and the electron beam acceleration voltage.
- 2005-01-10
著者
-
Toyoda Noriaki
Laboratory Of Advanced Science & Technology For Industry University Of Hyogo
-
Nagano Masahiro
Materials Science Research Laboratory, Central Research Institute of Electric Power Industry (CRIEPI), 2-11-1 Iwado Kita, Komaeshi, Tokyo 201-8511, Japan
-
Yamada Isao
Laboratory of Advanced Science & Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
-
Yamada Susumu
Materials Science Research Laboratory, Central Research Institute of Electric Power Industry (CRIEPI), 2-11-1 Iwado Kita, Komaeshi, Tokyo 201-8511, Japan
-
Akita Shirabe
Materials Science Research Laboratory, Central Research Institute of Electric Power Industry (CRIEPI), 2-11-1 Iwado Kita, Komaeshi, Tokyo 201-8511, Japan
-
Houzumi Shingo
Laboratory of Advanced Science & Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
-
Toyoda Noriaki
Laboratory of Advanced Science & Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
-
Houzumi Shingo
Laboratory of Advanced Science & Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
関連論文
- Optical Thin Film Formation with O_2 Cluster Ion Assisted Deposition
- Ultra-Smooth Surface Preparation Using Gas Cluster Ion Beams
- Optimum Incident Angle of Ar Cluster Ion Beam for Superhard Carbon Film Deposition
- Incident Angle Dependence of O2 Cluster Ions on Ta2O5 Thin Film Properties
- Near Edge X-Ray Absorption Fine Structure Study for Optimization of Hard Diamond-Like Carbon Film Formation with Ar Cluster Ion Beam
- Low-Damage Sputtering of GaAs and GaP Using Size-Selected Ar Cluster Ion Beams
- Scanning Tunneling Microscopy Observation of Graphite Surfaces Irradiated with Size-Selected Ar Cluster Ion Beams