Large Area Imaging by Fourier Transform Holography Using Soft and Hard X-rays
スポンサーリンク
概要
- 論文の詳細を見る
We studied a new method for large area imaging by Fourier transform holography in both soft and hard X-ray regions. In soft X-ray region, magnetic domain image of the perpendicular magnetized film was observed in the 8 μm area at an X-ray energy of 778 eV. In hard X-ray region, the method was applied to observe both the artificially patterned sample in 7 μm area and the cross-section of Cu-interconnect-line, at an X-ray energy of 5500 eV. The spatial resolution, estimated from the 10 to 90% intensity change, was 42 and 75 nm at 778 and 5500 eV, respectively.
- 2010-08-25
著者
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KODAMA Kenji
JASRI/SPring-8
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SUZUKI Motohiro
JASRI/SPring-8
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NAKAMURA Tetsuya
JASRI/SPring-8
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Tsunoda Masakiyo
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Awaji Naoki
Device Integration Technologies Laboratory Fujitsu Ltd. And Fujitsu Laboratories Ltd.
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Doi Shuuichi
Device Integration Technologies Laboratory Fujitsu Ltd. And Fujitsu Laboratories Ltd.
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Nomura Kenji
Device Integration Technol. Lab. Fujitsu Ltd. And Fujitsu Lab. Ltd. Kanagawa Jpn
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Isogami Shinji
Department Of Electronic Engineering Tohoku University
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Suzuki Motohiro
JASRI/SPring-8, Sayo, Hyogo 679-5198, Japan
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Awaji Naoki
Device Integration Technologies Laboratory, Fujitsu Ltd. and Fujitsu Laboratories Ltd., Atsugi, Kanagawa 243-0197, Japan
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Kodama Kenji
JASRI/SPring-8, Sayo, Hyogo 679-5198, Japan
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Doi Shuuichi
Device Integration Technologies Laboratory, Fujitsu Ltd. and Fujitsu Laboratories Ltd., Atsugi, Kanagawa 243-0197, Japan
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Nomura Kenji
Device Integration Technologies Laboratory, Fujitsu Ltd. and Fujitsu Laboratories Ltd., Atsugi, Kanagawa 243-0197, Japan
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