Fabrication of 1 Inch Mosaic Crystal Diamond Wafers
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概要
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We fabricated so-called mosaic single-crystal-diamond (SCD) wafers that consist of SCD sub-crystals with identical characteristics. These sub-crystal clones were obtained from a SCD seed crystal by repeating the lift-off process using ion implantation. We found that the junctions between the cloned sub-crystals were smoothly covered and no abnormal crystal growth occurred along the junctions. Therefore, the lift-off process can be applied to the production of freestanding SCD wafers with the same size. Based on these findings, we have succeeded in synthesizing 1 in. mosaic diamond wafers.
- 2010-05-25
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