Plasma Polymerization Coating of Tetraethoxysilane on Aluminum
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概要
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Tetraethoxysilane (TEOS) was polymerized by radio-frequency plasma and coated on aluminum for the purpose of corrosion protection. All plasma-coated films prevented aluminum from dissolving in alkaline solution remarkably. The corrosion resistance of the coated film was dependent on the plasma energy density (W/FM) : The coated film polymerized at higher W/FM showed better corrosion protection in spite of the thinner coated layer. From the results of XPS analysis, it was considered that the component of the film is gradually approaching to SiO<SUB>2</SUB> by increasing W/FM. The coated layer was thin and transparent enough to retain metallic appearance even after the immersion in alkaline solutions.
- Japan Society of Colour Materialの論文