Synthesis of Ultrafine Iron Oxide Particles by Microwave Plasma CVD Method
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概要
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Ultrafine iron oxide particles from sublimated chelate, acetylacetonate of Fe (III) were prepared by means of microwave plasma CVD method.<BR>The preparation was carried out in two stages. The first stage, the primary treatment, is the process where the sublimated chelates are deposited on the inner wall of the reactor. The second stage, the secondary treatment, is the process in which the remaining organic components are removed from the deposited substances utilizing the oxidation and decomposition action of oxygen plasma.<BR>The results showed that while a pressure of 3 Torr seemed to be the most appropriate condition in the primary treatment process, a pressure of 5 Torr showed highest efficiency in the secondary treatment process. The diameter of the particles obtained was around 10 nm as observed from TEM micrographs of particles.
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