The Production of Thin Metal Oxide Films by Spray Pyrolysis Using Supercritical CO2-Assisted Aerosolization of Aqueous Solutions
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Thin metal oxide films have been deposited onto various substrates, under ambient pressure, utilizing supercritical CO2-assisted nebulization of aqueous solutions. In this process, supercritical CO2 is contacted with an aqueous precursor solution inside a low-dead-volume tee. The resulting emulsion is allowed to expand out of a capillary restrictor, and the fine particle aerosol formed is directed toward heated substrates. Dehydration, pyrolysis and oxidation of the precursors occur at or near the surface of the substrate to form the desired metal oxide film. Thin films of zinc oxide, zinc gallate and manganese-doped zinc gallate have been prepared using this technique.
- 公益財団法人 ホソカワ粉体工学振興財団の論文
公益財団法人 ホソカワ粉体工学振興財団 | 論文
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