Improvement of an Optical Hydrogen Sensor Using Pd with Organic Thin Film
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The influence of Stearic Acid (SA) buffer layer on the durability and sensitivity of an optically readable H2 gas sensor using Pd film was investigated. The SA was deposited on a glass substrate by vacuum evaporation apparatus. The Pd film was deposited on a glass and the SA/glass substrate by r.f. magnetron sputtering technique. Blister formation of Pd film was remarkably suppressed by using SA thin film as a buffer layer. The Pd/SA films showed a high durability and sensitivity even after repeated hydrogen detection.
- 公益社団法人 日本セラミックス協会の論文
公益社団法人 日本セラミックス協会 | 論文
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