Fabrication of PZT Thick Films on Silicon Wafer by Powder Electrophoretic Deposition

概要

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Integration of piezoelectric films on silicon wafer is becoming very important for the applications in microelectromechanical systems (MEMS). Compared with other existing methods, electrophoretic deposition is a promising, simple and cost-effective method for fabrication of piezoelectric ceramic films. In this study, commercial lead zirconate titanate (PZT) powders were deposited onto silicon wafers coated with platinum electrodes by using electrophoretic deposition method in ethanol solution. The deposition behavior was investigated under different applied voltages and deposition duration. The morphologies and microstructures of as-deposited and sintered films were observed by scanning electron microscopy (SEM). Phase development of the PZT thick films was analyzed by X-ray diffraction to optimize the processing parameters.
公益社団法人日本セラミックス協会の論文