Preparation and Dielectric Properties of Ca-Doped Sr2(Nb0.3Ta0.7)2O7 Thin Films by Chemical Solution Deposition Method
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Ca-doped Sr2(Nb, Ta)2O7 thin films have been synthesized by the chemical solution deposition. Homogeneous and stable precursor solutions were prepared by controlling the reaction of starting metal alkoxides. The improvement of ferroelectric properties of the Sr2(Nb, Ta)2O7-based films were achieved through the Ca-substitution for Sr sites in the Sr2(Nb0.3Ta0.7)2O7 structure. (Sr1-xCax)2(Nb0.3Ta0.7)2O7 crystallized in the single-phase of (Sr, Ca)2 (Nb0.3Ta0.7)2O7 in the case of x<0.15 without any formation of the second phase such as Ca2Ta2O7. The crystallization temperature of the layered perovskite (Sr0.9Ca0.1)2(Nb0.3Ta0.7)2O7 thin films on Pt/Ir/Ti/SiO2/Si substrates was found to be below 700°C. (Sr0.9Ca0.1)2(Nb0.3Ta0.7)2O7 thin films crystallized at 750°C exhibited the typical ferroelectric hysteresis loop with Pr of 0.58 μC/cm2 and Ec of 80 kV/cm.
- 公益社団法人 日本セラミックス協会の論文
公益社団法人 日本セラミックス協会 | 論文
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