High Refractive-Index Thin Films Derived from Organic-inorganic Hybrid Materials

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Development of high refractive-index (nD>2.0) materials is needed for micro-optical devices to accomplish their optical performances. In this study, thin films of nD>2.0 were fabricated by heating the organic-inorganic hybrid films. The hybrid films of 0.1-1.0 μm in thickness were prepared on glass substrates by the dip-coating technique at room temperature, using titanium tetra-n-butoxide (TTBu), diphenyldimethoxysilane (DPhDMS), phenyltriethoxysilane (PTES) and 3-glycidoxypropyltrimethoxysilane (GPTMS) as starting materials. Refractive indices and thickness of the films were measured by the optical interference method. Refractive indices increased with increasing the TTBu content, and nD=1.74 was attained in the film of 80TTBu-10DPhDMS-10PTES composition. Subsequently, the films of 80TTBu-20(DPhDMS-PTES-GPTMS) compositions were heated up to 600°C under oxygen atmosphere, the transparent and amorphous films of nD=2.45±0.1 was achieved. Refractive indices of the hybrid films can be controlled from 1.52 to 1.74 by chosing the composition, and from 1.70 to 2.5 by selecting the heating temperatures.
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