Dielectric Properties of New Glass-Ceramics for LTCC Applied to Microwave or Millimeter-Wave Frequencies
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概要
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A new glass-ceramics material called MSG that consists of MgAl2O4 crystals (spinel) and highly crystallized Li-Mg-Zn-B-Si-O glass has been developed for microwave or millimeter-wave frequency applications. MSG can be sintered at temperatures below 1000°C and co-fired with internal copper electrodes that have high electrical conductivity. Its dielectric constant is 7.4 and its Q value is higher than 2000 at 24 GHz. MSG specimens were investigated using x-ray diffraction analysis (XRD), scanning electron microscopy (SEM), and energy dispersive x-ray spectrometry (EDX). MSG mainly consists of MgAl2O4, Mg3B2O6, and Li2MgSiO4 crystal phases, which have high Q values. Use of specifically designed cooling profiles after the sintering stage enhanced the recrystallization of the molten Li2MgSiO4 and crystallization in the residual glass, thus enabling a high Q value to be obtained.
- 公益社団法人 日本セラミックス協会の論文
公益社団法人 日本セラミックス協会 | 論文
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