Appearance of Surface Wrinkles with Heat Treatment of Ion Implanted Polyimide Films
スポンサーリンク
概要
- 論文の詳細を見る
We investigated the morphological change of Kapton derived carbon films by introduction of Ar and N ion implantation. Ar or N ions were implanted into the Kapton type Polyimide films at an energy of 100 keV with fluences ranging from 1×1012 to 1×1017 ions/cm2. Microstructural changes were examined by UV Raman spectroscopy (363.8 nm). Morphological changes on surfaces were observed with SEM and TEM. After heat-treatment at 1000°C for 30 min with a rate of 10°C/min, implanted surface with 1×1016 ions/cm2 fluences showed irregular wrinkle surfaces. Moreover, the wrinkle morphology remained and a new type of highly graphitized films with wrinkle surfaces was obtained after heat-treatment at 3000°C. No microstructural changes were observed as compared with non-implanted specimens by visible Raman spectroscopy (514.5 nm).
- 公益社団法人 日本セラミックス協会の論文
公益社団法人 日本セラミックス協会 | 論文
- Ferromagnetism in Fe doped ZnO synthesized by co-precipitation method
- Study on structural, magnetic and transport properties of La_Ca_Mn_Co_xO_3 (x = 0.01-0.05) thin films
- Fabrication of the finestructured alumina materials with nanoimprint method
- Correlation between the temperature of molten state and the SH intensity of 30BaO・15TiO_2・55GeO_2 crystallized glass
- Preparation of Pt particles dispersing nanocomposites by thermal treatment of tetrachloroplatinate/layered double hydroxide (LDH)